Method for producing a mirror plate for Fabry-Perot interferometer, and a mirror plate produced by the method

摘要

A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a base slab, which includes a substrate coated with a reflective multilayer coating, forming one or more intermediate layers on the base slab such that the lowermost intermediate layer substantially consists of silica, and such that the multilayer coating is at least partially covered by the lowermost intermediate layer, forming one or more capacitive sensor electrodes by depositing conductive material on top of the intermediate layers, and removing material of the lowermost intermediate layer by etching in order to form an exposed aperture portion of the multilayer coating.

主权项

1. A method for producing a mirror plate for a Fabry-Perot interferometer, the method comprising:
providing a base slab, which comprises a substrate coated with a semi-transparent reflective multilayer coating, forming one or more intermediate layers on the base slab such that the lowermost intermediate layer substantially consists of silica, and such that the multilayer coating is at least partially covered by the lowermost intermediate layer, forming one or more capacitive sensor electrodes by depositing conductive material on top of the one or more intermediate layers, and forming an exposed aperture portion of the multilayer coating by removing material of at least the lowermost intermediate layer by etching.