Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof

摘要

The invention provides a driving calibration apparatus of an electrostatic MEMS scanning mirror and a driving calibration method thereof The driving calibration method includes the following steps. Different reference voltages are sequentially set to drive a plane mirror of the electrostatic MEMS scanning mirror to swing. Projection positions on a projected surface corresponding to the reference voltages that the laser beam projects to are determined. A driving lookup table is established according to the reference voltages and the corresponding projection positions. Calibrated driving voltages corresponding to ideal projection positions are determined according to the driving lookup table. The pane mirror is driven to swing according to the calibrated driving voltages.

主权项

1. A driving calibration apparatus of an electrostatic MEMS scanning mirror comprising a plane mirror serving to guide a laser beam to project on a projected surface, the driving calibration apparatus comprising:
a voltage setting unit, serving to set a plurality of different reference voltages to drive the plane mirror to swing; a image capture unit, serving to sense a plurality of projection positions on the projected surface corresponding to the plurality of reference voltages that the laser beam projects to; and a data processing unit, serving to establish a driving lookup table according to the reference voltages and the corresponding projection positions and determine calibrated driving voltages corresponding to a plurality of ideal projection positions according to the driving lookup table, wherein the voltage setting unit drives the plane mirror to swing according to the calibrated driving voltages.