Semiconductor device and method of fabricating the same

摘要

A semiconductor device according to one embodiment includes: a semiconductor substrate provided with a semiconductor element; a first conductive member formed on the semiconductor substrate; a first insulating film formed on the same layer as the first conductive member; a second conductive member formed so as to contact with a portion of an upper surface of the first conductive member; a second insulating film formed on the first insulating film so as to contact with a portion of the upper surface of the first conductive member, and including at least one type of element among elements contained in the first insulating film except Si; and an etching stopper film formed on the second insulating film so as to contact with a portion of a side surface of the second conductive member, and having an upper edge located below the upper surface of the second conductive member.

主权项

1. A semiconductor device, comprising:
a semiconductor substrate; a first conductive member formed on the semiconductor substrate, the first conductive member being a contact having a shape of a circle or an elliptical shape in plan view; a first insulating film formed on the same layer as the first conductive member; a second conductive member having a side surface and a bottom surface, and formed so the bottom surface contacts with a portion of an upper surface of the first conductive member, the second conductive member being a wiring that extends beyond the first insulating film in plan view; a second insulating film formed on the first insulating film so as to contact with a portion of the upper surface of the first conductive member, and including at least one type of element among elements contained in the first insulating film except Si; and a third insulating film formed on the second insulating film so as to contact with a portion of the side surface of the second conductive member, and having an upper surface located below the upper surface of the second conductive member.