| 摘要 |
The present invention relates to an interferometer type interval control apparatus. The interferometer type interval control apparatus comprises: a light signal generating unit which generates a light signal; a probe which partially reflects and partially outputs onto an object, which is a subject, a characteristic of which the light signals the probe receives from the light signal generating unit is to be measured; a transporting device connected to a probe, moving in accordance with an applied control signal to transport the probe; a photo coupler which couples the light signal generated by the light signal generating unit and a light signal which is outputted from the probe onto the object, reflected by the object and then inputted back into the probe to generate and output an interference light signal; a light receiving unit which receives the interference light signal from the photo coupler, converts the interference light signal to an electrical signal, and outputting the electrical signal; and a control and signal processing unit which identifies an interference pattern based on a light signal intensity wave form in accordance with an interval between the probe and the object derived from the interference light signal as the electrical signal received from the light receiving unit determines whether the probe comes in contact with the object, generates the control signal to move the transporting device, and transmits the control signal to the transporting device. The present invention is capable of precisely controlling the interval between the object such as photoelectric elements and the probe, and measuring the interval between the probe and the object without bending the probe or destroying the object. |
