| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma-resistant member capable of reducing particles and also capable of stably maintaining a chamber condition.SOLUTION: There is provided a plasma-resistant member. The plasma-resistant member includes a base material; and a layer structure formed on a surface of the base material by an aerosol deposition method, including polycrystalline yttria and having plasma resistance. The polycrystalline yttria constituting the layer structure has a crystal structure comprising a mixture of a cubic crystal and a monoclinic crystal. The proportion of the monoclinic crystal to the cubic crystal in the polycrystalline yttria constituting the layer structure is 0% or more and 60% or less, and the polycrystalline yttria constituting the layer structure has a crystallite size of 8 nm or more and 50 nm or less.SELECTED DRAWING: Figure 1 |
