POWER DEVICE AND METHOD FOR FABRICATING THE SAME

摘要

A power device having fast switching characteristic, while keeping electromagnetic interference (EMI) noise to a minimum and a method of fabricating the same are provided. The power device comprises: a first field stop layer having a first conductivity type; a first drift region formed on the first field stop layer and having a first conductivity type in an impurity concentration that is lower than the first field stop layer; a buried region formed on the first drift region and having the first conductivity type in an impurity concentration that is higher than the first drift region; a second drift region formed on the buried region; a power device cell formed at an upper portion of the second drift region; and a collector region formed below the first field stop layer.