LASER ASSISTED BONDING FOR SEMICONDUCTOR DIE INTERCONNECTIONS

摘要

Laser assisted bonding for semiconductor die interconnections is disclosed and may, for example, include forming flux on a circuit pattern on a circuit board, placing a semiconductor die on the circuit board where a bump on the semiconductor die contacts the flux, and reflowing the bump by directing a laser beam toward the semiconductor die. The laser beam may volatize the flux and make an electrical connection between the bump and the circuit pattern. A jig plate may be placed on the semiconductor die when the laser beam is directed toward the semiconductor die. Warpage may be reduced during heating or cooling of the semiconductor die by applying pressure to the jig plate. Jig bars may extend outward from the jig plate and may be in contact with the circuit board during the application of pressure to the jig plate. The jig plate may comprise one or more of: silicon, silicon carbide, and glass.

主权项

1. A method for manufacturing a semiconductor device, the method comprising:
forming flux on a circuit pattern on a circuit board; placing a semiconductor die on the circuit board where a bump on the semiconductor die contacts the flux; and reflowing the bump by directing a laser beam toward the semiconductor die, volatizing the flux and making an electrical connection between the bump and the circuit pattern.