| 摘要 |
Provided is an alumina substrate whereby, when an AlN crystal or the like is created on the alumina substrate, a higher-quality crystal can be created, and an AlN layer on the alumina substrate has reduced warpage. In the present invention, an AlN layer including a carbon-containing phase is formed on a surface of the alumina substrate, and stress on the AlN layer is thereby alleviated, and warpage can be reduced. |
