THERMALLY CONDUCTIVE SHEET, CURED PRODUCT OF THERMALLY CONDUCTIVE SHEET, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thermally conductive sheet and a cured product of the sheet, which exhibit an excellent balance between thermal radiation property and insulating property, and a semiconductor device having high durability.SOLUTION: The thermally conductive sheet of the present invention includes a thermosetting resin (A) and an inorganic filler (B) dispersed in the thermosetting resin (A). In the measurement of a pore diameter distribution by a mercury intrusion method for the inorganic filler (B) included in an incineration residue after a cured product of the thermally conductive sheet is heated and incinerated at 700°C for 4 hours, a pore diameter distribution curve, which is measured through the mercury intrusion technique and is plotted with a pore diameter R as an abscissa and a logarithmic derivative of a pore volume (dV/d log R) as a vertical axis, has a peak (P) in the range where the pore diameter R is 1.0 μm or more and 10.0 μm or less; the peak (P) consists of two or more overlapping peaks.SELECTED DRAWING: None