| 摘要 |
The invention provides a thin film forming apparatus and a thin film forming method which can coat high-accurately and uniformly. The thin film forming apparatus comprises an adsorption table (9) for adsorbing and holding coated objects (100); a plurality of coating heads (4) one surface of which discharges coating materials to the surfaces of the coated objects (100) absorbed and held on the adsorption table (9) from inkjet nozzles and the other surface of which forms the thin film; and a gantry frame (3) for enabling the coating heads (4) to move above the coated objects (100), wherein the gantry frame (3) has a heat source device (31) for heating the surfaces of the coated objects (100). |
