| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor and a microphone having high sensitivity.SOLUTION: A pressure sensor includes a substrate and a sensor part provided on the substrate. The sensor part includes a transducing thin film, and first and second strain sensor elements. The transducing thin film has a film surface and is flexible. The first strain sensor element is provided at a position different from a center of gravity of the film surface on the film surface. The first strain sensor element includes first and second magnetic layers, and a first nonmagnetic interlayer provided therebetween. The second strain sensor element is provided at a position separated from the first strain sensor element and different from the center of gravity on the film surface. The second strain sensor element includes third and fourth magnetic layers and a second nonmagnetic interlayer provided therebetween. |
