| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma light source capable of generating ideal planar discharge for generating plasma that radiates extreme-ultraviolet light. <P>SOLUTION: The plasma light source comprises: a pair of coaxial electrodes 10 disposed to face each other and generate plasma that radiates extreme-ultraviolet light and confine the plasma; and a voltage application device 30 which applies a discharge voltage having an inverted polarity to each coaxial electrode 10. Each coaxial electrode 10 has a rod-like center electrode 12 extending on a single axis Z-Z, a plurality of external electrodes 14 arranged in the circumferential direction of the center electrode 12 at constant intervals therefrom, and an insulator 16 which insulates the center electrode 12 and the plurality of external electrodes 14. <P>COPYRIGHT: (C)2013,JPO&INPIT |
