发明名称 ディスペンサ装置、パターン欠陥修正装置、ディスペンサの詰まり解消方法
摘要 <P>PROBLEM TO BE SOLVED: To eliminate clogging of a dispenser without need for replacing the dispenser if such clogging occurs. <P>SOLUTION: A dispenser device includes: a dispenser 10 that has an optically transparent discharge section 10A and discharges coating material from a discharge port 10A1 at the end of the discharge section 10A; a laser light source 11 that emits laser beams with which the discharge section 10A can be irradiated; and an optical system 12 that makes the discharge section 10A irradiated with laser beams emitted from the laser light source 11. The discharge section 10A is irradiated with laser beams at a specific position thereof to fluidize a clogging cause staying at the specific position in the discharge section 10A, thus eliminating clogging of the dispenser 10. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5861166(B2) 申请公布日期 2016.02.16
申请号 JP20110129637 申请日期 2011.06.09
申请人 株式会社ブイ・テクノロジー 发明人 平野 貴文
分类号 B05C5/00;B05C11/10;B05D3/06;G02B5/20 主分类号 B05C5/00
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