发明名称 |
Photoelectric conversion element and photoelectric conversion element array |
摘要 |
A photoelectric conversion element which converts incident light to an electrical signal and detects the signal, the element including: a lower electrode; an insulating layer, provided on the lower electrode; a light-receiving section, which is provided on the insulating layer and receives incident light on the surface; and a groove-like slit, provided such that the insulating layer is exposed from a surface of the light-receiving section, wherein the incident light is converted by the slit to surface plasmons which are wave-guided along the insulating layer, and the surface plasmon is detected as an electrical signal between the light-receiving section and the lower electrode. |
申请公布号 |
US9263606(B2) |
申请公布日期 |
2016.02.16 |
申请号 |
US201313783537 |
申请日期 |
2013.03.04 |
申请人 |
Mitsubishi Electric Corporation |
发明人 |
Ogawa Shimpei |
分类号 |
H01L31/00;H01L31/0232;G01J1/44;G01J1/42;B82Y20/00;H01L31/09 |
主分类号 |
H01L31/00 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A photoelectric conversion element which converts incident light to an electrical signal and detects the signal, the element comprising:
a lower electrode; an insulating layer, provided on the lower electrode; a light-receiving section, which is provided on the insulating layer and receives incident light on the surface; and a groove-like slit, provided such that the insulating layer is exposed from a surface of the light-receiving section, wherein the incident light is converted by the slit to surface plasmons which are wave-guided along the insulating layer, and the surface plasmon is detected as an electrical signal between the light-receiving section and the lower electrode. |
地址 |
Tokyo JP |