MAGNET PLATE ASSEMBLY, AND APPARATUS FOR DEPOSITION COMPRISING THE SAME AND THE METHOD OF DEPOSITING USING THE SAME

摘要

According to one embodiment of the present invention, disclosed is a magnet plate assembly. The magnetic plate assembly includes: a magnetic body having a certain magnetic force; a magnet supporter supporting the magnetic body; a guide part supporting the magnet supporter, and having one or more aperture parts; a fixing part passing through the aperture part to be connected to the magnet supporter; and a driving part connected to the fixing part and controlling a sliding motion of the magnetic body for the guide part in a direction where the aperture part is formed.