Methods of measuring and controlling inner temperature of a chamber included in a test handler

摘要

To measure an inner temperature of a chamber included in a test handler, self-refresh currents of semiconductor memory devices under test are measured. The semiconductor memory devices are disposed in the chamber and have a function of linear temperature compensated self-refresh (Li-TCSR). Local temperature values are generated based on the self-refresh currents, where each local temperature value indicates a temperature near the corresponding semiconductor memory device of the semiconductor memory devices under test.

主权项

1. A method comprising:
measuring self-refresh currents of semiconductor memory devices under test, the semiconductor memory devices under test disposed in a chamber included in a test handler and having a function of linear temperature compensated self-refresh (Li-TCSR); and generating local temperature values based on the self-refresh currents, each local temperature value indicating a temperature near a corresponding semiconductor memory device of the semiconductor memory devices under test.