基板処理装置および基板処理方法,申请号JP20120049071-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	基板処理装置および基板処理方法
摘要
申请公布号	JP5860731(B2)	申请公布日期	2016.02.16
申请号	JP20120049071	申请日期	2012.03.06
申请人	株式会社ＳＣＲＥＥＮホールディングス	发明人	加藤雅彦;藤原直澄;宮勝彦
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Printing with varied types of ink dots

High-density ink-jet printhead having a multi-arrayed structure

Inhibitors of hepatitis C virus NS3 protease

Filter system; element configuration; and methods

Enhanced optical transceiver arrangement

Communication apparatus

Complementary metal oxide semiconductor with improved single event performance

Flash memory with controlled wordline width

Method of in-tube ultrasonic flaw detection

Modular graphic display system

Automated assembly line

Adhesive ball retrieval and guard system for sports equipment

Ophthalmic uses of lasers

System and method for non-linear detection of ultrasonic contrast agents at a fundamental frequency

13-substituted milbemycin derivatives, their preparation and their use against insects and other pests

Absorbent article having improved integrity and acquisition

System and method for derating an engine to encourage servicing of a vehicle

Sheet for in-mold decorating and in-mold decorated article

Three-dimensional model colorization during model construction from computer aided design data

Multi-language document search and retrieval system