Decoupling MIM capacitor designs for interposers and methods of manufacture thereof

摘要

Decoupling metal-insulator-metal (MIM) capacitor designs for interposers and methods of manufacture thereof are disclosed. In one embodiment, a method of forming a decoupling capacitor includes providing a packaging device, and forming a decoupling MIM capacitor in at least two metallization layers of the packaging device.

主权项

1. A method for forming a semiconductor device, the method comprising:
providing an interposer, the interposer having a first plurality of contact pads and a second plurality of contact pads, the interposer having a decoupling metal-insulator-metal (MIM) capacitor formed thereon, wherein the decoupling MIM capacitor comprises a bottom electrode, a capacitor dielectric over the bottom electrode, and a top electrode over the capacitor dielectric, wherein the interposer comprises a bottom plate pick-up, the bottom plate pick-up being interposed between the bottom electrode and a substrate of the interposer; and mounting an integrated circuit die to the second plurality of contact pads, the decoupling MIM capacitor being electrically interposed between the integrated circuit die and a first contact pad of the first plurality of contact pads.