发明名称 Linear device
摘要 A linear device is provided which can greatly reduce an amount of leakage of fine particles that are produced between a rolling element raceway and rolling elements to the outside of the device and which is therefore suitable for a semiconductor production apparatus or liquid crystal display panel production apparatus or other clean environment. In a linear device, each of a pair of seal members is formed to a shape which has a clearance of 0.025 to 0.15 mm in range with respect to a raceway member when cut along a direction perpendicular to the axial direction of the raceway member in a state attached to a moving member. Grease with a worked penetration of 175 to 250 is coated between the rolling element raceway and the rolling elements.
申请公布号 US9261178(B2) 申请公布日期 2016.02.16
申请号 US201213581200 申请日期 2012.08.01
申请人 NSK LTD. 发明人 Yamamoto Kazuhito;Ookubo Tsutomu
分类号 F16C33/00;F16C33/10;F16C29/06;F01D11/02;F16H25/22;F16H25/24 主分类号 F16C33/00
代理机构 Crowell & Moring LLP 代理人 Crowell & Moring LLP
主权项 1. A linear device comprising a raceway member which extends in an axial direction and which has a rolling element rolling part on its outer circumferential surface, a moving member which has a load rolling element rolling part which faces the rolling element rolling part on its inner circumferential surface and which can move relative to the raceway member, a plurality of rolling elements which are loaded rollably inside a rolling element raceway which is formed by the rolling element rolling part and the load rolling element rolling part, a rolling element recirculation path which connects a starting point and end point of the rolling element raceway to form an endless rolling element passage, and a pair of seal members which are respectively attached to two ends of the moving member in the axial direction, wherein each of the seal members is formed to a shape having a clearance of 0.025 to 0.15 mm with respect to the raceway member when cut along a direction perpendicular to the axial direction of the raceway member in a state attached to the moving member and wherein grease with a worked penetration of 175 to 250 is coated between the rolling element raceway and the rolling elements such that a respective grease layer is formed between the raceway member and the seal members to result in the clearance between the seal members and the raceway member becoming smaller by an amount of the grease layer, wherein a material of each of the seal members is made of a metal material, wherein the rolling element rolling part is a rolling element rolling groove formed on the outer circumferential surface of the raceway member, and wherein the clearance is defined as the geometrically smallest distance between a surface of the rolling element rolling grove to one of a plurality of corners of a tip of each respective one of the pair of seal members.
地址 Shinagawa-ku, Tokyo JP