发明名称 LIGHT SOURCE DEVICE AND EXPOSURE DEVICE
摘要 The purpose of the present invention is to provide a light source device which uses a plurality of light sources having different wavelengths and does not need to strictly dispose the light sources in a predetermined arrangement. A plurality of LD modules (1, 2) each include one laser diode (LD) and one condensing lens and emit laser beams having different wavelengths. The LD of each of the LD modules (1, 2) is controlled by a controller (99) and controls lighting, non-lighting, and an output (illumination). A first optical fiber bundle unit (b1) receives exit light of three LD modules (1) and one LD module (2), and integrates the exit light into one second optical fiber (7) through four first optical fibers (5) and a first connector (6). In addition, the three second optical fibers (7) are guided to a second optical fiber bundle unit (b2) such that an exit end side thereof is tied in an arrangement pattern according to a shape of a light irradiation region in a DMD (56) inside an exposure head (18), is connected to a third optical fiber (9), is connected to an incident optical system (40) through a second connector (10), and introduces a laser beam into the exposure head (18) of an exposure device (B).
申请公布号 KR20160016571(A) 申请公布日期 2016.02.15
申请号 KR20150077850 申请日期 2015.06.02
申请人 ADTEC ENGINEERING CO., LTD. 发明人 TAKEDA KOUITIROU;YAMAMOTO KEN;SUGITA KENICHI;YAMAZAKI TUNEO;KANG SUNGJUN;OTUKA AKIRA;KAWASAKI HIROKI;HIKI TATUYA;IMAI HIROYUKI
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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