| 摘要 |
Disclosed is a probe station. The probe station includes a chuck for supporting a substrate, a probe card which is arranged in the upper part of the chuck and electrically inspects semiconductor devices formed on the substrate, a driving part which moves the chuck in vertical and horizontal directions to make the semiconductor devices on the substrate touch the probes of the probe card, and an LC circuit which is connected between the chuck and the driving part and prevents noise from being introduced from the driving part into the chuck. |
