CONDUCTIVE ATOMIC FORCE MICROSCOPE AND METHOD FOR OPERATING THE SAME

摘要

A conductive atomic force microscope apparatus and a method for operating the conductive atomic force microscope apparatus are provided according to technology of the present invention. The conductive atomic force microscope apparatus includes: a plurality of probe structures comprising a probe and a cantilever connected to the probe respectively; a power source part for applying a bias voltage to each of a reference sample and a measurement sample; a current detection part which detects a current flowing between the reference sample and the probe structure and a current flowing between the measurement sample and the probe structure respectively, and calculates a representative current value of each of the reference sample and the measurement sample; and a control part which performs an algorithm for calculating a scaling factor scaling the representative current value of the measurement sample measured by each probe structure, by calculating a ratio of the representative current value of the reference sample measured by each probe structure.