发明名称 STATE-BASED ADJUSTMENT OF POWER AND FREQUENCY
摘要 Systems and methods for state-based adjustment of power and frequency are described. A primary generator of a system includes a primary power supply for supplying a primary radio frequency (RF) signal to an electrode. The primary generator further includes an automatic frequency control (AFC) to provide a first frequency input to the primary power supply when a pulsed signal is in a first state. A secondary generator of the system includes a secondary power supply for supplying a secondary RF signal to the electrode. The secondary generator also includes an AFC to provide a second frequency input to the secondary power supply when the pulsed signal is in the first state. The secondary generator includes an AFC to provide a third frequency input to the secondary power supply when the pulsed signal is in a second state. The system includes a digital pulsing source for generating the pulsed signal.
申请公布号 US2016044775(A1) 申请公布日期 2016.02.11
申请号 US201514918492 申请日期 2015.10.20
申请人 Lam Research Corporation 发明人 Valcore, JR. John C.;Lyndaker Bradford J.
分类号 H05H1/46;H02J3/00 主分类号 H05H1/46
代理机构 代理人
主权项 1. A system comprising: a primary generator for coupling to an electrode, wherein the primary generator includes a primary power supply for supplying a primary radio frequency (RF) signal to the electrode, wherein the primary generator further includes an automatic frequency control (AFC) to provide a first frequency input to the primary power supply when a pulsed signal is in a first state, wherein the AFC of the primary generator is coupled to the primary power supply; a secondary generator for coupling to the electrode, wherein the secondary generator includes a secondary power supply for supplying a secondary RF signal to the electrode, wherein the secondary generator includes an AFC to provide a second frequency input to the secondary power supply when the pulsed signal is in the first state, wherein the secondary generator includes an AFC to provide a third frequency input to the secondary power supply when the pulsed signal is in a second state, wherein the AFCs of the secondary generator are coupled to the secondary power supply; and a digital pulsing source for generating the pulsed signal, wherein the digital pulsing source is coupled to the primary generator and the secondary generator.
地址 Fremont CA US