发明名称 |
PROCESS MAPPING OF TRANSIENT THERMAL RESPONSE DUE TO VALUE CHANGES IN A PROCESS VARIABLE |
摘要 |
A method includes conducting a plurality of tests on process variables of a manufacturing process, with a test of the plurality of tests being associated with two combinations of process variables, the test having first values for a first combination of process variables at a first time and second values for a second combination of process variables at a second time, the test comprising: locally heating a region of a structure, wherein the local heating results in formation of a thermal field in the structure; assessing one or more thermal characteristics of the thermal field during a transition between the first combination of process variables and the second combination of process variables; and based on results of the plurality of tests, generating a process map of a transient response of the one or more thermal characteristics of the thermal field. |
申请公布号 |
US2016041111(A1) |
申请公布日期 |
2016.02.11 |
申请号 |
US201414776445 |
申请日期 |
2014.03.14 |
申请人 |
CARNEGIE MELLON UNIVERSITY |
发明人 |
Beuth Jack Lee;Fox Jason Cho |
分类号 |
G01N25/00;B23K31/12;B23K31/02 |
主分类号 |
G01N25/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method comprising:
conducting a plurality of tests on process variables of a thermal process, with a test of the plurality of tests being associated with two combinations of process variables, the test having first values for a first combination of process variables at a first time and second values for a second combination of process variables at a second time, the test comprising:
locally heating a region of a structure, wherein the local heating results in formation of a thermal field in the structure;assessing one or more thermal characteristics of the thermal field during a transition between the first combination of process variables and the second combination of process variables; and based on results of the plurality of tests, generating a process map of a transient response of the one or more thermal characteristics of the thermal field, with the transient response based on a function of the first combination of process variables and the second combination of process variables. |
地址 |
Pittsburg PA US |