摘要 |
Some embodiments may include a closure element for a vacuum valve that may be configured, for example, for the gastight closing of a process volume by means of cooperation with a vacuum valve opening of the vacuum valve. In some embodiments, the closure element may include a first sealing surface, corresponding to a second sealing surface of the vacuum valve opening, wherein the second sealing surface surrounds the vacuum valve opening, and a sealing material vulcanized onto the first sealing surface and in accordance with its course and having a defined height in the direction of the surface normal of the first sealing surface. In some embodiments, the sealing material may have a defined shape with respect to a sealing material cross section, comprising a first seal portion, provided on the process volume side, and a second seal portion, provided, in particular, facing away from the process volume. |