发明名称 |
WAFER PROCESSING SYSTEM AND WAFER PROCESSING METHOD USING SAME |
摘要 |
A wafer processing system and a wafer processing method are disclosed. A semiconductor manufacturer is provided with a wafer comprising a wafer ID assigned by a wafer manufacturer. Next, the wafer ID is mapped as a wafer unique identification code of the semiconductor manufacturer, and then the wafer ID is identified as the wafer unique identification code without the need to form a separate laser mark. |
申请公布号 |
WO2016021778(A1) |
申请公布日期 |
2016.02.11 |
申请号 |
WO2014KR11369 |
申请日期 |
2014.11.25 |
申请人 |
SK HYNIX INC. |
发明人 |
SHIN, SANG HOON;JANG, HEYUN SU;LEE, CHANG HO;SHIN, HEE YOUNG;JUNG, EUN JIN |
分类号 |
H01L23/544;H01L21/027 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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