发明名称 WAFER PROCESSING SYSTEM AND WAFER PROCESSING METHOD USING SAME
摘要 A wafer processing system and a wafer processing method are disclosed. A semiconductor manufacturer is provided with a wafer comprising a wafer ID assigned by a wafer manufacturer. Next, the wafer ID is mapped as a wafer unique identification code of the semiconductor manufacturer, and then the wafer ID is identified as the wafer unique identification code without the need to form a separate laser mark.
申请公布号 WO2016021778(A1) 申请公布日期 2016.02.11
申请号 WO2014KR11369 申请日期 2014.11.25
申请人 SK HYNIX INC. 发明人 SHIN, SANG HOON;JANG, HEYUN SU;LEE, CHANG HO;SHIN, HEE YOUNG;JUNG, EUN JIN
分类号 H01L23/544;H01L21/027 主分类号 H01L23/544
代理机构 代理人
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