BOARD PROCESSING APPARATUS

摘要

Provided is a board processing apparatus, in which the shield body part of a top-plate covers the space above the upper surface of a board. A shield reinforcement part (232) is fixed within the shield body part and supports the shield body part. Attachment parts (233) are attached to a board support part outside the circumferential edge of the board in the radial direction. Board push parts (142) push the board from above in the vicinity of the circumferential edge of the board. The shield reinforcement part (232) comprises a central part (321) and a plurality of peripheral parts (322). The plurality of peripheral parts (322) extend radially outward from the central part (321) to the vicinity of the circumferential edge of the board and are circumferentially apart from each other. The attachment parts (233) and board push parts (142) are disposed on the radially outer end portions of the plurality of peripheral parts (322). In this way, it is made possible to suppress the thermal deformation of the top-plate and suppress the change in the relative positions of the attachment parts (233) and board push parts (142).