发明名称 半導体装置
摘要 A first dual-gate electrode includes a gate electrode located on a first active region and having a first silicon film of a first conductivity type and a gate electrode located on a second active region and having a first silicon film of a second conductivity type. A second dual-gate electrode includes a gate electrode located on a third active region and having a second silicon film of the first conductivity type and a gate electrode located on a fourth active region and having a second silicon film of the second conductivity type. At least a portion of the first silicon film of the first conductivity type has a first-conductivity-type impurity concentration higher than that of a portion of the second silicon film of the first conductivity type located on the third active region.
申请公布号 JP5857225(B2) 申请公布日期 2016.02.10
申请号 JP20120530800 申请日期 2011.11.04
申请人 パナソニックIPマネジメント株式会社 发明人 佐藤 好弘;新井 秀幸;山田 隆順
分类号 H01L21/8238;H01L21/8244;H01L27/092;H01L27/10;H01L27/11;H01L29/423;H01L29/49 主分类号 H01L21/8238
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