| 摘要 |
PROBLEM TO BE SOLVED: To secure rigidity at a high temperature even while using an aluminum support plate, to eliminate warping or bending under a high temperature and further to perform insulation coating, such as, so-called alumite treatment with high corrosion resistance as the aluminum support plate.SOLUTION: A substrate heating plate heater comprises a support plate 1 formed from a 5000 series or 6000 series aluminum alloy plate and a heater wire 3 embedded in the support plate 1. In the support plate 1, a reinforcement member 4 of which the rigidity is higher than that of the support plate 1, is embedded along the heater wire 3. A 5000 series or 6000 series aluminum alloy cover body 7 having the same quality of material as that of the support plate 1 covers locations where the heater wire 3 and the reinforcement member 4 are embedded, in the support plate 1. Joint parts of the cover body 7 and the support plate 1 are integrated and alumite coating is applied over all surfaces of the support plate 1 and the cover body 7. |
