| 摘要 |
PROBLEM TO BE SOLVED: To provide an electro-mechanical conversion device that is suitable for handling relatively high-frequency elastic wave and capable of increasing ratio of effective capacity for parasitic capacity.SOLUTION: An electro-mechanical conversion device comprises: a first electrode 204; a vibration part 203 supported through air gap with respect to the first electrode 204 by a supporting part 206; a second electrode 201 formed on the vibration part 203; and wiring 202 formed on the vibration part 203 and electrically connected to the second electrode 201. In the vibration part 203, the second electrode 201 is provided closer to a surface facing the first electrode 204 of the vibration part 203 than the wiring 202. |
