发明名称 WAFER JOINING METHOD, WAFER ASSEMBLAGE, AND CHIP
摘要 A method for joining a first wafer to at least a second wafer. The method is characterized by the following operations of depositing a sinterable bonding material on at least one of the wafers, joining the wafers, and sintering the bonding material by heating. Furthermore, a wafer composite and a chip are also described.
申请公布号 EP2183185(B1) 申请公布日期 2016.02.10
申请号 EP20080774763 申请日期 2008.07.04
申请人 ROBERT BOSCH GMBH 发明人 DONIS, DIETER;KOENIG, JENS
分类号 B81C1/00;H01L21/20;H01L23/10 主分类号 B81C1/00
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