| 发明名称 | Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element | ||
| 摘要 | Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, in which the zirconium oxide layer is formed of granular crystal grains. | ||
| 申请公布号 | US9254651(B2) | 申请公布日期 | 2016.02.09 |
| 申请号 | US201313849909 | 申请日期 | 2013.03.25 |
| 申请人 | Seiko Epson Corporation | 发明人 | Ohashi Koji;Itayama Yasuhiro;Kurokawa Kenichi;Osawa Eiji;Noguchi Motohisa |
| 分类号 | B41J2/045;B41J2/14;B41J2/16;H01L41/08;H01L41/09;H01L41/319;H01L41/18;H01L41/22;H01L41/27 | 主分类号 | B41J2/045 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A liquid ejecting head comprising a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on a upper portion of a zirconium oxide layer, wherein the zirconium oxide layer is formed of granular crystal grains, and wherein a scratch strength of the zirconium oxide layer formed of granular crystal grains is greater than 1000 mN. | ||
| 地址 | JP | ||