发明名称 NON-VACUUM PROCESS METHOD OF THIN FILM USING HIGH PRESSURE SELENIZATION PROCESS
摘要 The present invention relates to a non-vacuum processed manufacturing method of a thin film using a high-pressure selenization process for manufacturing a light absorbing layer of a solar cell, and to a method of forming a CI(S)G-based thin film by a heat treatment in a selenium (Se) gas atmosphere maintaining a predetermined partial pressure and a solar cell applying the method of forming a CI(S)G-based thin film.
申请公布号 KR101591719(B1) 申请公布日期 2016.02.05
申请号 KR20140117639 申请日期 2014.09.04
申请人 KOREA INSTITUTE OF ENERGY RESEARCH 发明人 CHO, A RA;GWAK, JI HYE;EO, YOUNG JOO;AHN, SE JIN;AHN, SEUNG KYU;CHO, JUN SIK;PARK, JU HYUNG;YU, JIN SU;YUN, JAE HO;KIM, KI HWAN
分类号 H01L31/18;H01L31/0445;H01L31/0749 主分类号 H01L31/18
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