NON-VACUUM PROCESS METHOD OF THIN FILM USING HIGH PRESSURE SELENIZATION PROCESS
摘要
The present invention relates to a non-vacuum processed manufacturing method of a thin film using a high-pressure selenization process for manufacturing a light absorbing layer of a solar cell, and to a method of forming a CI(S)G-based thin film by a heat treatment in a selenium (Se) gas atmosphere maintaining a predetermined partial pressure and a solar cell applying the method of forming a CI(S)G-based thin film.
申请公布号
KR101591719(B1)
申请公布日期
2016.02.05
申请号
KR20140117639
申请日期
2014.09.04
申请人
KOREA INSTITUTE OF ENERGY RESEARCH
发明人
CHO, A RA;GWAK, JI HYE;EO, YOUNG JOO;AHN, SE JIN;AHN, SEUNG KYU;CHO, JUN SIK;PARK, JU HYUNG;YU, JIN SU;YUN, JAE HO;KIM, KI HWAN