FILM FORMATION METHOD AND FILM FORMATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To increase thin film pattern formation accuracy.SOLUTION: A film formation method includes the steps of: applying a liquid film formation material 16 to a display surface 4a of a display panel 4 from the side of a metal mask 6 while heating the metal mask 6 in the state of bringing the metal mask 6 into intimate contact with the display surface 4a of the display panel 4; and forming a thin film pattern by heating and burning the applied liquid film formation material 16.SELECTED DRAWING: Figure 1