| 摘要 |
PROBLEM TO BE SOLVED: To provide a Hall sensor capable of preventing a leak current from being increased even in the case where a GaAs Hall element is made small-sized and thin in the Hall sensor with an islandless structure.SOLUTION: The Hall sensor includes: a GaAs Hall element 10 including a magneto-sensitive part 12 provided on a GaAs substrate 11, electrodes 13a-13d and a protection layer 40 provided at the side of a surface of the GaAs substrate 11 opposite to the side where the electrodes 13a-13d are provided; lead terminals 22-25 disposed around the GaAs Hall element 10; thin metal wires 31-34 electrically connecting the electrodes 13a-13d and the lead terminals 22-25, respectively; and a mold member 50 for molding these components. A first surface of the protection layer 40 and the lead terminals 22-25 (namely, a surface at an opposite side to a surface connected with the thin metal wires 31-34) is exposed from the same surface of the mold member 50. Resistivity of the GaAs substrate 11 is equal to or higher than 5.0×10&OHgr; cm.SELECTED DRAWING: Figure 1 |
