ELASTIC WAVE DEVICE WITH INTEGRATED INDUCTOR

摘要

An elastic wave device includes an interdigital transducer (IDT) electrode disposed on an upper surface of a piezoelectric substrate, a wiring electrode disposed on the upper surface of the piezoelectric substrate and connected to the IDT electrode, and a first insulator layer disposed on the upper surface of the piezoelectric substrate. The first insulator layer seals the IDT electrode and the wiring electrode and includes a first resin and a first filler. A resin layer including no filler is provided on an upper surface of the first insulator layer. An inductor electrode is disposed on an upper to surface of the resin layer. A second insulator layer is disposed on the upper surface of the resin layer and covers the inductor electrode. A terminal electrode is disposed on an upper surface of the second insulator layer. A connecting electrode electrically connects the wiring electrode, the terminal electrode, and the inductor electrode.

主权项

1. An elastic wave device comprising:
a piezoelectric substrate; an interdigital transducer (IDT) electrode disposed on an upper surface of the piezoelectric substrate; a wiring electrode disposed on the upper surface of the piezoelectric substrate and connected to the IDT electrode; a first insulator layer disposed on the upper surface of the piezoelectric to substrate, the first insulator layer sealing the IDT electrode and the wiring electrode, the first insulator layer including a first resin and a first filler dispersed in the first resin; a resin layer, distinct from the first insulator layer, provided on an upper surface of the first insulator layer, the resin layer including no filler; an inductor electrode disposed on an upper surface of the resin layer; a second insulator layer disposed on the upper surface of the resin layer, the second insulator covering the inductor electrode; a terminal electrode disposed on an upper surface of the second insulator layer; and a connecting electrode passing through the first insulator layer, the second insulator layer, and the resin layer, the connecting electrode electrically connecting the wiring electrode, the terminal electrode, and the inductor electrode.