| 发明名称 |
OPTICAL METROLOGY WITH PURGED REFERENCE CHIP |
| 摘要 |
An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device, and a reference chip purge device provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. The reference chip purge device may be static or movable with the reference chip. |
| 申请公布号 |
US2016033399(A1) |
申请公布日期 |
2016.02.04 |
| 申请号 |
US201514809054 |
申请日期 |
2015.07.24 |
| 申请人 |
Nanometrics Incorporated |
发明人 |
KLASSEN Andrew S.;Hazelton Andrew J.;Barada Andrew H.;Petit Todd M.;Tu Chuan Sheng |
| 分类号 |
G01N21/47;G01N21/01 |
主分类号 |
G01N21/47 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus comprising:
a chuck for holding a sample and positioning the sample with respect to an optical metrology device; a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device; and a reference chip purge device that provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. |
| 地址 |
Milpitas CA US |
