Apparatus for fabricating semiconductor devices,申请号US19590810939-传众专利搜索

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发明名称	Apparatus for fabricating semiconductor devices
摘要
申请公布号	US3130031(A)	申请公布日期	1964.04.21
申请号	US19590810939	申请日期	1959.05.04
申请人	PHILCO CORPORATION	发明人	JR. JOHN F. MCMAHON,;MICHEL JOSEPH HAROLD
分类号	H01J9/32;H01L21/00	主分类号	H01J9/32
代理机构		代理人
主权项
地址

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