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发明名称
半導体装置及びその製造方法
摘要
申请公布号
JP5852937(B2)
申请公布日期
2016.02.03
申请号
JP20120165869
申请日期
2012.07.26
申请人
株式会社ソシオネクスト
发明人
依田 博行;夏秋 昌典;芥川 泰人;今野 慎吾;穂積 孝司;小島 功
分类号
H01L23/12;H01L21/3205;H01L21/768;H01L23/522;H01L23/532
主分类号
H01L23/12
代理机构
代理人
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地址
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