发明名称 Measurement technique for thin-film characterization
摘要 A measurement device comprises a high permittivity dielectric resonator 10 within an electrically conductive resonance chamber 100. The chamber has a plurality of similar ports 104 each with a microwave antenna either to inject microwaves into the chamber, thereby to excite an electric field in the resonator, or to receive microwaves from the chamber. A comparator circuit is connected to a first port P1 which injects microwaves and to another port P2, P3 which receives microwaves from the resonance chamber. An electrically conductive tuning screw 106 is positionable in the electric field excited in the resonator. A source of magnetism 18 applies a magnetic field to a sample brought into proximity with a top surface 12 of the resonator. One port P3 which receives microwaves from the chamber is orthogonal to the port P1 which injects microwaves. The device may measure both the conductivity or sheet resistance and the carrier mobility of a thin film (e.g. grapheme), without contacting the resonator with either the thin film or a substrate on which the thin film is formed.
申请公布号 GB2528667(A) 申请公布日期 2016.02.03
申请号 GB20140013237 申请日期 2014.07.25
申请人 THE SECRETARY OF STATE FOR BUSINESS INNOVATION & SKILLS 发明人 JOHN CHARLES GALLOP;LING HAO
分类号 G01N22/00 主分类号 G01N22/00
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