| 摘要 |
A screen printing machine for printing a dopant-containing paste (paste), which is coated on the pattern-printing area (P) (printing area (P)) of a printing mask (32), on the printing surface of a p-type silicon substrate (2) disposed below the printing area (P) through an open pattern provided on the printing area (P). The screen printing machine is equipped with dam members (36) on the outside of a scraper sliding area on the upper surface of the printing mask (32). The side walls of the dam member bottom surfaces at least on the printing area (P)-side adhere tightly to the upper surface of the printing mask (32) and the dam members turn paste that has been forced out of the scraper sliding area back toward the scraper sliding area. For the dam members (36), the side walls of the bottom surfaces on the printing area (P)-side are configured from deformable members (37), which are capable of separating from the main bodies of the dam members by bending under their own weight toward the p-type silicon substrate (2) following the bending of the printing mask (32) while still adhering tightly to the upper surface of the printing mask (32). |
