Microfluidic die with multiple heaters in a chamber

摘要

The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

主权项

1. A device, comprising:
a substrate; a first heater on the substrate; a second heater spaced from the first heater on the substrate, the first heater being larger in area than the second heater; a first microfluidic chamber aligned with the first heater and the second heater; a first nozzle aligned with the first chamber; and a channel region in fluid communication with the first microfluidic chamber and the first nozzle, the first heater being separated from the channel region by the second heater, the first nozzle being separated from the channel region by the second heater.