| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel evaluation method of organic contamination on a semiconductor substrate surface.SOLUTION: A semiconductor substrate surface organic contamination evaluation method includes the steps of: acquiring photoluminescence intensity information on a semiconductor substrate surface of an evaluation object; and performing evaluation of evaluation items selected from a group consisting of existence or absence, a degree and in-plane distribution of organic contamination on the semiconductor substrate surface of the evaluation object based on the acquired photoluminescence intensity information.SELECTED DRAWING: None |
