METHOD FOR MANUFACTURING SUBSTRATE FOR ELECTRO-OPTIC DEVICE, SUBSTRATE FOR ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for an electro-optic device in which a conductive film can be separated by a groove in a self-aligning manner, a substrate for an electro-optic device, an electro-optic device including the substrate for an electro-optic device, and electronic equipment.SOLUTION: The method for manufacturing an element substrate 10 as a substrate for an electro-optic device includes: a step of forming a TFT 14 as a switching element above a substrate 11 as a transparent substrate; a step of forming a third interlayer insulating film 17 as a first insulating film above the TFT 14; a step of forming a groove 21 opening on a boundary of pixels on a surface 17s of the third interlayer insulating film 17; and a step of forming a light-transmitting conductive film on the surface 17s of the third interlayer insulating film 17. The groove 21 functions as a prism.SELECTED DRAWING: Figure 6