OPTICAL TRANSFORMATION MODULE AND OPTICAL MEASUREMENT SYSTEM

摘要

An optical measurement system according to embodiments of the present invention may include: a parallel light generation part which generates a parallel light to be incident to a surface of an object to be tested, and can change a wavelength of the parallel light; a spinning grating which can change an incident angle and an incident position of the parallel light with respect to a surface of the object to be tested according to a spinning angle and the wavelength of the parallel light as configured to be rotatable at a fixed spinning angle while being located on a path of the parallel light; and a collection part which collects a reflected light generated as the parallel light passing through the spinning grating is incident to and reflected from the surface of the object to be tested at the incident angle and the incident position. The optical measurement system can test the surface of the object to be tested rapidly, since the optical measurement system can change the incident angle and the incident position of the parallel light with respect to the surface of the object to be tested by changing the wavelength and rotating the spinning grating. In addition, the present invention can increase defect detection efficiency of the optical measurement system, and can increase total efficiency and productivity of a semiconductor production process.