LIGHT OPTICS INTEGRATED IN CHARGED PARTICLE LENS AND GAS DELIVERY

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column.SOLUTION: A charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens which includes a final electrode that is closest to the specimen holding position. The final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.