Methods of Forming Charge-Trapping Regions

摘要

Some embodiments include methods of forming charge-trapping zones. The methods may include forming nanoparticles, transferring the nanoparticles to a liquid to form a dispersion, forming an aerosol from the dispersion, and then directing the aerosol onto a substrate to form charge-trapping centers comprising the nanoparticles. The charge-trapping zones may be incorporated into flash memory cells.

主权项

1. A method of forming a charge-trapping zone, comprising:
forming a plurality of nanoparticles; coating the nanoparticles with electrically conductive material to form coated nanoparticles prior to transferring the nanoparticles to the liquid transferring the coated nanoparticles to a liquid, and forming a dispersion of the nanoparticles within the liquid; forming an aerosol from the dispersion; and directing the aerosol onto a substrate utilizing the aerosol to form charge-trapping centers comprising the nanoparticles, individual charge-trapping centers being spaced from one another by intervening gaps.