PIEZOELECTRIC MEMBRANE, PIEZOELECTRIC DEVICE, AND INKJET HEAD

摘要

An inkjet head includes a substrate that defines a cavity in which ink is stored, a vibrating membrane that is supported by the substrate and that defines the cavity, and a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane. The piezoelectric device includes a lower electrode, a piezoelectric membrane that is disposed on the lower electrode, and an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode. The piezoelectric membrane includes a columnar structure layer and an amorphous structure layer of a piezoelectric material. The amorphous structure layer is stacked contiguously with the columnar structure layer.

主权项

1. A piezoelectric membrane comprising:
a columnar structure layer; and an amorphous structure layer of a piezoelectric material, the amorphous structure layer being stacked contiguously with the columnar structure layer.