| 摘要 |
PROBLEM TO BE SOLVED: To provide a failure analyzer for semiconductor devices that can specify locations of failures of semiconductor devices with unclear circuit information, using an OBIRCH method.SOLUTION: A laser scanner 3 applies laser light to a semiconductor device 2 to be measured, while scanning the laser light. Voltage controllers 401 to 404 supply voltages to terminals 201 to 204 of the semiconductor device 2 while changing the voltages. Current variation detectors 501 to 504 detect variations in currents flowing in the terminals 201 to 204 of the semiconductor device 2. A locking-in processor 7 performs locking-in processing on the detected change in the current in the i-th terminal and a reference signal for a j-th terminal. An image comparison and excellence determination unit 8 determines the presence or absence of an abnormality in a circuit where a current from or to the i-th terminal changes, according to a voltage applied to the j-th terminal based on the result of the locking-in processing. |
