发明名称 |
Charged Particle Beam Device, Sample Observation Method, Sample Platform, Observation System, and Light Emitting Member |
摘要 |
The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member. |
申请公布号 |
US2016025659(A1) |
申请公布日期 |
2016.01.28 |
申请号 |
US201414774367 |
申请日期 |
2014.01.22 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OMINAMI Yusuke;SATO Mitsugu;UCHIDA Kenko;ASO Sadamitsu;SAKAZUME Taku;MORISHITA Hideo;ITO Sukehiro;OHSHIMA Takashi |
分类号 |
G01N23/225;G01N23/22 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Tokyo JP |